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</div> </div> <div id="mmoy8ssk" class="subright fr"> <div id="mmoy8ssk" class="conBox"> <div id="mmoy8ssk" class="ArticleTitle"> <h1>半導(dǎo)體行業(yè)有機(jī)廢氣來(lái)源及治理</h1> </div> <div id="mmoy8ssk" class="ArticleMessage"><span>發(fā)布時(shí)間：2022-04-09 10:45</span><span>人氣：<i id="hits"><s id="rrzJsIdViewCount" style="display: inline;color:inherit;text-decoration:none;"><script type="text/javascript" src="/view/count.asp?t=article&id=81" async></script></s></i></span></div> <div class="mmoy8ssk" id="article" class="ArticleTencont"> <p> <p>　　一、半導(dǎo)體制造工藝過(guò)程中揮發(fā)的各種有機(jī)廢氣，半導(dǎo)體廢氣排放具有排氣量大、排放濃度小的特點(diǎn)。這些廢氣排放主要可以分為四類：酸性氣體、堿性氣體、有機(jī)廢氣和有毒氣體。</p><p><br/></p><p>　　1、酸堿廢氣主要來(lái)自于擴(kuò)散、CVD、CMP及刻蝕等工序，這些工序使用酸堿清洗液對(duì)晶片進(jìn)行清洗。目前，在半導(dǎo)體制造工藝中使用為普遍的清洗溶劑為過(guò)氧化氫和硫酸的混合劑。這些工序中產(chǎn)生的廢氣包括硫酸、氫氟酸、鹽酸、硝酸及磷酸等的揮發(fā)氣。</p><p><br/></p><p>　　2、堿性氣體為氨氣。</p><p><img src="/storage/images/20220407/55b23d0f4e587121db5cd111a82e138b.jpg" width="745" height="424" border="0" vspace="0" title="催化燃燒廢氣處理設(shè)備" alt="催化燃燒廢氣處理設(shè)備" style="width: 745px; height: 424px;"/></p><p style="text-align: center;"><span style="font-size: 14px; color: rgb(245, 6, 6);"><a href="http:///feiqichulishebeizhanshi/cuihuaranshaoshebei.html" target="_blank">催化燃燒</a>廢氣處理設(shè)備</span></p><p>　　3、有機(jī)廢氣主要來(lái)源于光刻、顯影、刻蝕及擴(kuò)散等工序，在這些工序中要用有機(jī)溶液(如異丙醇)對(duì)晶片表面進(jìn)行清洗，其揮發(fā)產(chǎn)生的廢氣是有機(jī)廢氣的來(lái)源之一:同時(shí)，在光刻、刻蝕等過(guò)程中使用的光阻劑(光刻膠)中含有易揮發(fā)的有機(jī)溶劑，如醋酸丁酯等，在晶片處理過(guò)程中也要揮發(fā)到大氣中，是有機(jī)廢氣產(chǎn)生的又一來(lái)源。</p><p><br/></p><p>　　4、有毒廢氣主要來(lái)源于晶體外延、干法刻蝕及CVD等工序中，在這些工序中要使用到多種高純特殊氣體對(duì)晶片進(jìn)行處理，如硅烷(SiH4)、磷烷(PH3)、四氟化碳(CF4)、硼烷、三氯化硼等，部分特殊氣體具有毒害性、窒息性及腐蝕性</p><p><img src="/storage/images/20220408/a0949877aa5b6fafb336658d31327272.jpg" width="745" height="716" border="0" vspace="0" title="" alt="" style="width: 745px; height: 716px;"/></p><p>　　二、半導(dǎo)體行業(yè)有機(jī)廢氣處理方法：</p><p><br/></p><p>　　半導(dǎo)體工藝過(guò)程中有機(jī)廢氣具有排放風(fēng)量大、濃度低和成分復(fù)雜的特點(diǎn)，使用其它的處理技術(shù)難以達(dá)到令人滿意的處理效果?，F(xiàn)在大多采用活性炭吸附脫附<a href="http:///feiqichulishebeizhanshi/cuihuaranshaoshebei.html" target="_blank">催化燃燒</a>法。也有一些大型半導(dǎo)體企業(yè)已采用沸石轉(zhuǎn)輪催化燃燒技術(shù)。下面佑泰環(huán)保小編為您簡(jiǎn)單介紹這兩種設(shè)備。</p><p><br/></p><p>　　<strong>2.1、<a href="http:///feiqichulishebeizhanshi/cuihuaranshaoshebei.html" target="_blank">催化燃燒</a>設(shè)備：</strong></p><p><br/></p><p>　　半導(dǎo)體工藝產(chǎn)生的廢氣經(jīng)蜂窩活性炭處理后，達(dá)標(biāo)排放。本設(shè)備的工作原理是利用微孔活性物質(zhì)對(duì)溶劑分子或分子團(tuán)的吸附力，當(dāng)廢氣通過(guò)吸附介質(zhì)時(shí)，其中的有機(jī)溶劑即被阻留下來(lái)，從而使有機(jī)廢氣得到凈化處理，當(dāng)吸附體吸附飽和后，又根據(jù)分子熱運(yùn)動(dòng)理論，從外界加給吸附體系熱能，提高被吸附分子或分子團(tuán)的熱運(yùn)動(dòng)能量，當(dāng)分子熱動(dòng)力足以克服吸附力時(shí)，有機(jī)溶劑分子便從吸附體系中爭(zhēng)脫出來(lái)，從而使吸附介質(zhì)得到再生。</p><p style="text-align: center;"><img src="/storage/images/20220407/e3c86b5be54de402d25052a3b23ed454.jpg" width="745" height="454" border="0" vspace="0" title="4萬(wàn)風(fēng)量催化燃燒" alt="4萬(wàn)風(fēng)量催化燃燒" style="width: 745px; height: 454px;"/><span style="color: rgb(249, 12, 12); font-size: 14px;">4萬(wàn)風(fēng)量<a href="http:///feiqichulishebeizhanshi/cuihuaranshaoshebei.html" target="_blank">催化燃燒</a></span></p><p>　　吸附：在引風(fēng)機(jī)的作用下將捕集后的低溫、低濃度廢氣進(jìn)入凈化裝置內(nèi)吸附體，廢氣通過(guò)蜂窩狀蜂窩活性炭吸附凈化，凈化后空氣通過(guò)風(fēng)機(jī)經(jīng)過(guò)排氣筒排空。</p><p><br/></p><p>　　脫附再生：當(dāng)蜂窩狀蜂窩活性炭在吸附室內(nèi)吸附至濃縮到飽和定量值時(shí)，從吸附體中自動(dòng)轉(zhuǎn)換1個(gè)室為脫附室，自動(dòng)循環(huán)轉(zhuǎn)換吸附、脫附。</p><p><br/></p><p>　　脫附時(shí)，由生產(chǎn)作業(yè)室外的氣體作為脫附氣體，在經(jīng)過(guò)熱交換器的作用下，使蜂窩活性炭碳室進(jìn)行脫附。脫附出的氣體經(jīng)熱交換器后進(jìn)入脫附設(shè)備，將溫度升至300℃左右，燃燒后的氣體再進(jìn)入熱交換器，與脫附出的氣體進(jìn)行熱交換，對(duì)脫附氣體進(jìn)行預(yù)加熱，加熱進(jìn)氣，提高熱能利用率，減少加熱電能。</p><p><br/></p><p>　　脫附下來(lái)的有機(jī)廢氣經(jīng)阻火器并經(jīng)主進(jìn)風(fēng)閥/旁通閥切換調(diào)節(jié)進(jìn)入熱交換器，通過(guò)熱交換器的換熱，使溫度較低的有機(jī)廢氣加熱到起燃溫度。然后升溫后的有機(jī)廢氣進(jìn)入氧化反應(yīng)床，在高溫氧化作用下，有機(jī)物進(jìn)行氧化反應(yīng)生成H2O和CO2。由于催化反應(yīng)放熱，使反應(yīng)后氣體溫度上升達(dá)到一定的溫度值。反應(yīng)后的高溫氣體經(jīng)熱交換器換熱，預(yù)熱脫附廢氣使溫度升高，并且反應(yīng)后的高溫氣體降低一定量的溫度，***后經(jīng)排風(fēng)機(jī)高空排放。</p><p><img src="/storage/images/20211029/3954a574931efa3d601b6205262d0d38.jpg" width="745" height="559" border="0" vspace="0" title="10萬(wàn)風(fēng)量催化燃燒設(shè)備" alt="10萬(wàn)風(fēng)量催化燃燒設(shè)備" style="width: 745px; height: 559px;"/></p><p style="text-align: center;"><span style="font-size: 14px; color: rgb(249, 12, 12);">10萬(wàn)風(fēng)量<a href="http:///feiqichulishebeizhanshi/cuihuaranshaoshebei.html" target="_blank">催化燃燒</a>設(shè)備</span></p><p>　<strong>　2.2、沸石轉(zhuǎn)輪<a href="http:///feiqichulishebeizhanshi/cuihuaranshaoshebei.html" target="_blank">催化燃燒</a>設(shè)備</strong></p><p><br/></p><p>　　沸石轉(zhuǎn)輪<a href="http:///feiqichulishebeizhanshi/cuihuaranshaoshebei.html" target="_blank">催化燃燒</a>VOCs處理設(shè)備，是將吸附濃縮單元和熱氧化單元有機(jī)地結(jié)合起來(lái)的一種方法，主要針對(duì)大風(fēng)量、低濃度的有機(jī)廢氣，經(jīng)吸附凈化并脫附后轉(zhuǎn)換成小風(fēng)量、高濃度的有機(jī)廢氣，對(duì)其進(jìn)行焚燒處理，并將有機(jī)物燃燒釋放的熱量有效利用。它適用于汽車、家具噴涂、化工、制藥、電子、印刷、制鞋、塑料等行業(yè)，對(duì)含有苯、酯、醇、酮、醛、酚等VOCs廢氣的凈化及消除臭味，適用于常溫、低濃度、不宜采用直接燃燒、催化燃燒和吸附回收處理的有機(jī)廢氣，尤其對(duì)大風(fēng)量的處理場(chǎng)合，均可獲得滿意的經(jīng)濟(jì)效益和社會(huì)效益。</p><p>　　</p><p><img src="/storage/images/20220409/84bb9d33b053c4b89f2e46d37a026f3b.jpg"/></p><p style="text-align: center;"><span style="color: rgb(249, 12, 12); font-size: 14px;">沸石轉(zhuǎn)輪示意圖</span></p><p><br/></p><p>　　1、高吸、脫附效率，使原本高風(fēng)量、低濃度的VOCs廢氣，轉(zhuǎn)換成低風(fēng)量、高濃度的廢氣，降低后端終處理設(shè)備的成本。</p><p><br/></p><p>　　2、沸石轉(zhuǎn)輪吸附VOCs所產(chǎn)生的壓降極低，可大大減少電力能耗。</p><p><br/></p><p>　　3、濃縮倍數(shù)達(dá)到3-15倍，大大縮小后處理設(shè)備的規(guī)格，運(yùn)行成本更低。</p><p><br/></p><p>　　4、整體系統(tǒng)采預(yù)組及模塊化設(shè)計(jì)，具備了zui小的空間需求，且提供了持續(xù)性及無(wú)人化的操控模式。</p><p><img src="/storage/images/20220408/efd672f0e3e052bab8960e3965b4c65c.jpg"/></p></p> </div> <div id="mmoy8ssk" class="clear"></div> <div id="mmoy8ssk" class="reLink clearfix"> <div id="mmoy8ssk" class="prevLink"> 上一篇：沒(méi)有了 </div> <div id="mmoy8ssk" class="nextLink"> 下一篇：沒(méi)有了 </div> </div> <p style="text-align: left;"> <span style="font-family: "Microsoft Yahei", PingFangSC-Regular, "Helvetica Neue", Helvetica, Arial, "Hiragino Sans GB", "Heiti SC", "WenQuanYi Micro 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